Industry experts developed the SEMI EDA (Equipment Data Acquisition) standards in
order to facilitate data acquisition integration and improve data
quality. Fabs will
use EDA for APC data gathering and e-diagnostics while the
existing SECS/GEM interface will remain intact for MES
connectivity. Correct EDA implementations will have a
significant impact on the equipment manufacturer's software
architecture to enable full access to necessary data as requested
by the International SEMATECH Manufacturing Initiative (ISMI).
- Key benefits of EDA
- Data & Reporting Features available through
the SEMI EDA Standards
- Possible challenges implementing EDA