Data Fusion at the Source: Standards and Technologies for Seamless Sensor Integration Presentation from 2015 SEMICON Taiwan

Background and motivation:

  • Advanced wafer fabs increasingly use external sensors to improve process visibility and control
  • The number and variety of sources for equipment and process data is growing steadily
  • The demand for more data will likewise accelerate as “big data” analysis tools become commonplace
  • Custom integration solutions result in a “trail mix” factory architecture which is impossible to support